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@inproceedings{qiao:medsi2020-tuoa01,
author = {Z. Qiao and J.W.J. Anton and L. Assoufid and S.P. Kearney and S.T. Mashrafi and J. Qian and X. Shi and D. Shu},
% author = {Z. Qiao and J.W.J. Anton and L. Assoufid and S.P. Kearney and S.T. Mashrafi and J. Qian and others},
% author = {Z. Qiao and others},
title = {{Surface Twist Characterization and Compensation of an Elliptically Bent Hard X-Ray Mirror}},
booktitle = {Proc. MEDSI'20},
pages = {99--102},
eid = {TUOA01},
language = {english},
keywords = {optics, MMI, photon, simulation, focusing},
venue = {Chicago, IL, USA},
series = {Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
number = {11},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {10},
year = {2021},
issn = {2673-5520},
isbn = {978-3-95450-229-5},
doi = {10.18429/JACoW-MEDSI2020-TUOA01},
url = {https://jacow.org/medsi2020/papers/tuoa01.pdf},
note = {https://doi.org/10.18429/JACoW-MEDSI2020-TUOA01},
abstract = {{Deformable optics, including mechanically-bent and bimorph mirrors, are essential optical elements for X-ray beam dynamical focusing and wavefront correction. Existing mechanical bender technology often suffers from poor repeatability and does not include twist compensation. We recently developed an elliptically bent mirror based on a laminar flexure bending mechanism that yielded promising results*,**. In this work, the mirror surface twist was characterized using a Fizeau interferometer under different bending conditions. By applying a shimming correction, the surface twist was successfully reduced from 50 urad to 1.5 urad. The twist angle variation from no bending to the maximum bending is less than 0.5 urad. Our simulation results show that these numbers are significantly lower than the required values to ensure optimum optical performance. The study demonstrates the effectiveness of the twist compensation procedures and validates the mirror bender design parameters.}},
}