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TY - CONF AU - Qiao, Z. AU - Anton, J.W.J. AU - Assoufid, L. AU - Kearney, S.P. AU - Mashrafi, S.T. AU - Qian, J. AU - Shi, X. AU - Shu, D. ED - Jaski, Yifei ED - Den Hartog, Patric ED - Jaje, Kelly ED - Schaa, Volker R.W. TI - Surface Twist Characterization and Compensation of an Elliptically Bent Hard X-Ray Mirror J2 - Proc. of MEDSI2020, Chicago, IL, USA, 24-29 July 2021 CY - Chicago, IL, USA T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 11 LA - english AB - Deformable optics, including mechanically-bent and bimorph mirrors, are essential optical elements for X-ray beam dynamical focusing and wavefront correction. Existing mechanical bender technology often suffers from poor repeatability and does not include twist compensation. We recently developed an elliptically bent mirror based on a laminar flexure bending mechanism that yielded promising results*,**. In this work, the mirror surface twist was characterized using a Fizeau interferometer under different bending conditions. By applying a shimming correction, the surface twist was successfully reduced from 50 urad to 1.5 urad. The twist angle variation from no bending to the maximum bending is less than 0.5 urad. Our simulation results show that these numbers are significantly lower than the required values to ensure optimum optical performance. The study demonstrates the effectiveness of the twist compensation procedures and validates the mirror bender design parameters. PB - JACoW Publishing CP - Geneva, Switzerland SP - 99 EP - 102 KW - optics KW - MMI KW - photon KW - simulation KW - focusing DA - 2021/10 PY - 2021 SN - 2673-5520 SN - 978-3-95450-229-5 DO - doi:10.18429/JACoW-MEDSI2020-TUOA01 UR - https://jacow.org/medsi2020/papers/tuoa01.pdf ER -