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BiBTeX citation export for TUPC10: Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics

@inproceedings{shu:medsi2020-tupc10,
  author       = {D. Shu and J.W.J. Anton and L. Assoufid and S.J. Bean and D. Capatina and V. De Andrade and E.M. Dufresne and T. Graber and R. Harder and D. Haskel and K. Jasionowski and S.P. Kearney and A.A. Khan and B. Lai and W. Liu and J. Maser and S.T. Mashrafi and G.K. Mistri and S. Narayanan and C.A. Preissner and M. Ramanathan and L. Rebuffi and R. Reininger and O.A. Schmidt and X. Shi and J.Z. Tischler and K.J. Wakefield and D. Walko and J. Wang and X. Zhang},
% author       = {D. Shu and J.W.J. Anton and L. Assoufid and S.J. Bean and D. Capatina and V. De Andrade and others},
% author       = {D. Shu and others},
  title        = {{Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics}},
  booktitle    = {Proc. MEDSI'20},
  pages        = {199--202},
  eid          = {TUPC10},
  language     = {english},
  keywords     = {focusing, optics, alignment, photon, synchrotron},
  venue        = {Chicago, IL, USA},
  series       = {Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
  number       = {11},
  publisher    = {JACoW Publishing, Geneva, Switzerland},
  month        = {10},
  year         = {2021},
  issn         = {2673-5520},
  isbn         = {978-3-95450-229-5},
  doi          = {10.18429/JACoW-MEDSI2020-TUPC10},
  url          = {https://jacow.org/medsi2020/papers/tupc10.pdf},
  note         = {https://doi.org/10.18429/JACoW-MEDSI2020-TUPC10},
  abstract     = {{Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper.}},
}