Author: Alloza, D.
Paper Title Page
WEPA07 The Fizeau System Instrument at ALBA Optics Laboratory 235
  • L.R.M. Ribó, D. Alloza, C. Colldelram, J. Nicolás, I. Šics
    ALBA-CELLS Synchrotron, Cerdanyola del Vallès, Spain
  The ALBA optics laboratory has recently acquired a new Zygo Verifire HD Fizeau interferometer. The instrument has been integrated into a positioning stage to allow stitching of long x-ray optical elements. The mechanical set up, with four axes, allows for automatic positioning and alignment of the interferometer aperture to the surface under test. The longitudinal movement allows for scan of X-ray mirrors up to 1500 m long. The positioning platform includes two angles, roll and yaw, and two translations, vertical and longitudinal translations. The longitudinal translation is a custom designed linear stage. The yaw rotation is based on a sine arm mechanism. The vertical and roll motions are combined in a single stage, closely integrated around the main linear stage. The system reaches repeatabilities better than 1 µm or 1 µrad for all axes. The system is mounted on top of a vibration isolated bench in the clean room of the laboratory. The control software of the instrument allow direct control of every individual axis, and allows selecting the center of rotation for both roll and yaw. The system includes inclinometers and autocollimators to control the relative orientation between the interferometer and the mirror under test. The system is integrated to the software of the interferometer, and includes features for automatic alignment of the interferometer to the mirror, or for automatic stitching acquisition, with selectable parameters. The system allows for full three-dimensional characterization of the optical surface of mirrors and gratings, and provides height map reconstructions with accuracy in the order of 1 nm, for flat or curved surfaces with lengths up to 1500 mm.  
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About • paper received ※ 29 July 2021       paper accepted ※ 21 October 2021       issue date ※ 28 October 2021  
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