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RIS citation export for TUPA01: Oxygen-Free Titanium Thin Film as a New Nonevaporable Getter with an Activation Temperature as Low as 185 °C

TY  - CONF
AU  - Ono, M.
AU  - Kikuchi, T.
AU  - Mase, K.
AU  - Masuda, Y.
AU  - Nakayama, Y.
AU  - Ohno, S.
AU  - Ozawa, K.
AU  - Sato, Y.
AU  - Yoshikawa, I.
AU  - Yoshioka, K.
ED  - Jaski, Yifei
ED  - Den Hartog, Patric
ED  - Jaje, Kelly
ED  - Schaa, Volker R.W.
TI  - Oxygen-Free Titanium Thin Film as a New Nonevaporable Getter with an Activation Temperature as Low as 185 °C
J2  - Proc. of MEDSI2020, Chicago, IL, USA, 24-29 July 2021
CY  - Chicago, IL, USA
T2  - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation
T3  - 11
LA  - english
AB  - Although nonevaporable getter (NEG) pumps are widely used in synchrotron radiation facilities, pure metal Titanium (Ti) has not been used as a NEG because the activation temperature of a Ti thin film deposited by DC magnetron sputtering was reported to be 350-400 °C*. Recently Miyazawa et al. found that high-purity Ti deposited under ultra-high vacuum (UHV) followed by N₂ introduction works as a NEG with an activation temperature of 185 °C**,***. Since the concentration of impurities such as O, C, and N in the Ti thin film prepared by this method is 0.05% or less, we named this as oxygen-free Ti. In this study, we evaluated the pumping properties of oxygen-free Ti thin films after high-purity N₂ introduction by total and partial pressure measurements. A vacuum vessel with oxygen-free Ti deposited on the inner walls was found to pump H₂, H₂O, O₂, CO and CO₂ even after 30 cycles of high purity N₂ introduction, air exposure, pumping, and baking at 185 °C. Furthermore, we analyzed the oxygen-free Ti thin films after high-purity N₂ or air introduction by synchrotron radiation X-ray photoelectron spectroscopy. The results show that more TiN was formed when high-purity N₂ was introduced after oxygen-free Ti deposition. High purity of the Ti thin film and TiN formation on the surface seem to be responsible for the reduced activation temperature as low as 185 °C.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
SP  - 119
EP  - 122
KW  - vacuum
KW  - site
KW  - quadrupole
KW  - synchrotron-radiation
KW  - synchrotron
DA  - 2021/10
PY  - 2021
SN  - 2673-5520
SN  - 978-3-95450-229-5
DO  - doi:10.18429/JACoW-MEDSI2020-TUPA01
UR  - https://jacow.org/medsi2020/papers/tupa01.pdf
ER  -