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TY - CONF AU - Shu, D. AU - Anton, J.W.J. AU - Assoufid, L. AU - Bean, S.J. AU - Capatina, D. AU - De Andrade, V. AU - Dufresne, E.M. AU - Graber, T. AU - Harder, R. AU - Haskel, D. AU - Jasionowski, K. AU - Kearney, S.P. AU - Khan, A.A. AU - Lai, B. AU - Liu, W. AU - Maser, J. AU - Mashrafi, S.T. AU - Mistri, G.K. AU - Narayanan, S. AU - Preissner, C.A. AU - Ramanathan, M. AU - Rebuffi, L. AU - Reininger, R. AU - Schmidt, O.A. AU - Shi, X. AU - Tischler, J.Z. AU - Wakefield, K.J. AU - Walko, D. AU - Wang, J. AU - Zhang, X. ED - Jaski, Yifei ED - Den Hartog, Patric ED - Jaje, Kelly ED - Schaa, Volker R.W. TI - Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics J2 - Proc. of MEDSI2020, Chicago, IL, USA, 24-29 July 2021 CY - Chicago, IL, USA T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 11 LA - english AB - Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper. PB - JACoW Publishing CP - Geneva, Switzerland SP - 199 EP - 202 KW - focusing KW - optics KW - alignment KW - photon KW - synchrotron DA - 2021/10 PY - 2021 SN - 2673-5520 SN - 978-3-95450-229-5 DO - doi:10.18429/JACoW-MEDSI2020-TUPC10 UR - https://jacow.org/medsi2020/papers/tupc10.pdf ER -