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RIS citation export for TUPC10: Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics

TY  - CONF
AU  - Shu, D.
AU  - Anton, J.W.J.
AU  - Assoufid, L.
AU  - Bean, S.J.
AU  - Capatina, D.
AU  - De Andrade, V.
AU  - Dufresne, E.M.
AU  - Graber, T.
AU  - Harder, R.
AU  - Haskel, D.
AU  - Jasionowski, K.
AU  - Kearney, S.P.
AU  - Khan, A.A.
AU  - Lai, B.
AU  - Liu, W.
AU  - Maser, J.
AU  - Mashrafi, S.T.
AU  - Mistri, G.K.
AU  - Narayanan, S.
AU  - Preissner, C.A.
AU  - Ramanathan, M.
AU  - Rebuffi, L.
AU  - Reininger, R.
AU  - Schmidt, O.A.
AU  - Shi, X.
AU  - Tischler, J.Z.
AU  - Wakefield, K.J.
AU  - Walko, D.
AU  - Wang, J.
AU  - Zhang, X.
ED  - Jaski, Yifei
ED  - Den Hartog, Patric
ED  - Jaje, Kelly
ED  - Schaa, Volker R.W.
TI  - Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics
J2  - Proc. of MEDSI2020, Chicago, IL, USA, 24-29 July 2021
CY  - Chicago, IL, USA
T2  - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation
T3  - 11
LA  - english
AB  - Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
SP  - 199
EP  - 202
KW  - focusing
KW  - optics
KW  - alignment
KW  - photon
KW  - synchrotron
DA  - 2021/10
PY  - 2021
SN  - 2673-5520
SN  - 978-3-95450-229-5
DO  - doi:10.18429/JACoW-MEDSI2020-TUPC10
UR  - https://jacow.org/medsi2020/papers/tupc10.pdf
ER  -