|THOA01||A Family of High-Stability Granite Stages for Synchrotron Applications||341|
Funding: Advanced Photon Source, a U.S. Department of Energy (DOE) Office of Science User Facility, operated for the DOE Office of Science by Argonne National Laboratory under Contract No. DE-AC02-06CH11357.
Engineers at the APS have developed a granite, air-bearing stage concept that provides many millimeters of motion range and nanometer-level vibrational stability. This technique was first conceptualized and used on the Velociprobe x-ray microscope. The success of that design spurred adaption of the approach to over 90 devices, including many new instruments at the APS and high performing instruments at other synchrotrons. This paper details the design concept, some performance measurements, and new developments allowing for a six-degree-of-freedom device.
|Slides THOA01 [12.006 MB]|
|DOI •||reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-THOA01|
|About •||paper received ※ 13 August 2021 paper accepted ※ 13 October 2021 issue date ※ 10 November 2021|
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