Author: Maser, J.
Paper Title Page
MOPC10 Mechanical Design Progress of the In Situ Nanoprobe Instrument for APS-U 71
 
  • S.P. Kearney, S. Chen, B. Lai, J. Maser, T. Mooney, D. Shu
    ANL, Lemont, Illinois, USA
 
  Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
The In Situ Nanoprobe (ISN, 19-ID) beamline will be a new best-in-class long beamline to be constructed as part of the Advanced Photon Source Upgrade (APS-U) project*,**. To achieve long working distance at high spatial resolution, the ISN instrument will be positioned 210 m downstream of the x-ray source, in a dedicated satellite building, currently under construction***. The ISN instrument will use a nano-focusing Kirkpatrick-Baez (K-B) mirror system, which will focus hard x-rays to a focal spot as small as 20 nm, with a large working distance of 61 mm. The large working distance provides space for various in situ sample cells for x-ray fluorescence tomography and ptychographic 3D imaging, allows the use of a separate, independent vacuum chambers for the optics and sample, and provides the flexibility to run experiments in vacuum or at ambient pressure. A consequence of the small spot size and large working distance is the requirement for high angular stability of the KB mirrors (5 nrad V-mirror and 16 nrad H-mirror) and high relative stability between focus spot and sample (4 nmRMS). Additional features include fly-scanning a maximum of a 2 kg sample plus in situ cell at 1 mm/s in vertical and/or horizontal directions over an area of 10 mm x 10 mm. Environmental capabilities will include heating and cooling, flow of fluids and applied fields, as required for electrochemistry and flow of gases at high temperature for catalysis. To achieve these features and precise requirements we have used precision engineering fundamentals to guide the design process. We will discuss in detail the current design of the instrument focusing on the precision engineering used to achieve the stability, metrology, and positioning requirements.
* J. Maser, et al. Metal and Mat Trans A (2014) 45: 85.
** J. Maser, et al. Microsc. Microanal. 24 (Suppl 2), 2018.
*** S. P. Kearney, et al. Synchrotron Radiat. News Volume 32 (5), 2019.
 
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-MOPC10  
About • paper received ※ 28 July 2021       paper accepted ※ 05 October 2021       issue date ※ 27 October 2021  
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TUPC10 Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics 199
 
  • D. Shu, J.W.J. Anton, L. Assoufid, S.J. Bean, D. Capatina, V. De Andrade, E.M. Dufresne, T. Graber, R. Harder, D. Haskel, K. Jasionowski, S.P. Kearney, A.A. Khan, B. Lai, W. Liu, J. Maser, S.T. Mashrafi, G.K. Mistri, S. Narayanan, C.A. Preissner, M. Ramanathan, L. Rebuffi, R. Reininger, O.A. Schmidt, X. Shi, J.Z. Tischler, K.J. Wakefield, D. Walko, J. Wang, X. Zhang
    ANL, Lemont, Illinois, USA
 
  Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper.
* Kirkpartrick and Baez, JOSA. 1948; 38(9): 766-773.
** S. Kearney et al., this conference.
*** J. Anton et al., this conference.
**** C. Preissner et al., this conference.
 
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-TUPC10  
About • paper received ※ 02 August 2021       paper accepted ※ 21 October 2021       issue date ※ 31 October 2021  
Export • reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)