Precision mechanics
Nano-Positionning
Paper Title Page
TUOA02 Conceptual Design of the Cavity Mechanical System for Cavity-Based X-Ray Free Electron Laser 103
 
  • D. Shu, J.W.J. Anton, L. Assoufid, W.G. Jansma, S.P. Kearney, K.-J. Kim, R.R. Lindberg, S.T. Mashrafi, X. Shi, Yu. Shvyd’ko, W.F. Toter, M. White
    ANL, Lemont, Illinois, USA
  • H. Bassan, F.-J. Decker, G.L. Gassner, Z. Huang, G. Marcus, H.-D. Nuhn, T.-F. Tan, D. Zhu
    SLAC, Menlo Park, California, USA
 
  Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract DE-AC02-06CH1 1357 (ANL) and DE-AC02-76SF00515 (SLAC).
The concept behind the cavity-based X-ray FELs (CBXFELs) such as the X-ray free-electron laser oscillator (XFELO)* and the X-ray regenerative amplifier free-electron laser (XRAFEL)** is to form an X-ray cavity with a set of narrow bandwidth diamond Bragg crystals. Storing and recirculating the output of an amplifier in an X- ray cavity so that the X-ray pulse can interact with following fresh electron bunches over many passes enables the development of full temporal coherence. One of the key challenges to forming the X-ray cavity is the precision of the cavity mechanical system design and construction. In this paper, we present conceptual design of the cavity mechanical system that is currently under development for use in a proof-of-principle cavity-based X-ray free electron laser experiment at the LCLS-II at SLAC.
*Kwang-Je Kim et al., TUPRB096, Proceedings of IPAC2019
**Gabe Marcus et al., TUD04, Proceedings of IPAC2019
 
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-TUOA02  
About • paper received ※ 02 August 2021       paper accepted ※ 05 October 2021       issue date ※ 30 October 2021  
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TUPB10
Spider - A Mobile Test-Platform for 3D Scanning With Nanometer-Foci  
 
  • P. Wiljes
    DESY, Hamburg, Germany
 
  During the past years multiple experiments were designed and built at facilities world wide to do 3D tomography scans on the low nanometer scale. At this resolution effects like vibrations, thermal drifts and manufacturing tolerances become more and more critical even when state of the art components are used. In preparation of the PETRA IV upgrade at DESY, a test device will be designed and used both in the lab as well as at the beamlines to develop and test alignment routines for nano-optics and the sample environment. To keep track on positions and vibration levels during experiments, metrology like interferometers are foreseen within the device.  
poster icon Poster TUPB10 [0.974 MB]  
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TUPC09 Progress of Nano-Positioning Design for the Coherent Surface Scattering Imaging Instrument for the Advanced Photon Source Upgrade Project 196
 
  • J.W.J. Anton, M. Chu, Z. Jiang, S. Narayanan, D. Shu, J. Strzalka, J. Wang
    ANL, Lemont, Illinois, USA
 
  Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
As part of the Advanced Photon Source Upgrade (APS-U) project, the Coherent Surface Scattering Imaging (CSSI) [1] instrument is currently being developed. One of the most important components of the CSSI instrument at the 9-ID beamline of the APS-U, the Kirkpatrick-Baez (K-B) mirror system, will focus hard X-rays to a diffrac-tion-limited size of 500 nanometers at a working distance of 550 mm. High angular stability (19 nrad for the hori-zontal mirror and 14 nrad for the vertical mirror) is speci-fied no just for the focused beamsize but, more important-ly, to ensure the beam stability at the detector position that is up to 24 m from the K-B mirrors. A large sample-to-detector distance (up to 23 m), one of the beamline’s unique features for achieving a sufficient coherent-imaging spatial oversampling, requires sample angular stability of 50 nrad. In CSSI scattering geometry, the vertically placed sample reflects X-rays in the horizontal direction at an extremely shallow angle. The design in-cludes two high-precision rotary stages for sample pitch (vertical axis) and yaw (horizontal axis). The current design of instrument’s nano-positioning stages [2] and metrology required to satisfy the stability and positioning requirements are discussed in this paper.
*T. Sun et al., Nat. Photonics 6, 586 (2012).
**D. Shu et al., this conference.
 
poster icon Poster TUPC09 [1.252 MB]  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-TUPC09  
About • paper received ※ 13 August 2021       paper accepted ※ 16 October 2021       issue date ※ 27 October 2021  
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TUPC10 Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics 199
 
  • D. Shu, J.W.J. Anton, L. Assoufid, S.J. Bean, D. Capatina, V. De Andrade, E.M. Dufresne, T. Graber, R. Harder, D. Haskel, K. Jasionowski, S.P. Kearney, A.A. Khan, B. Lai, W. Liu, J. Maser, S.T. Mashrafi, G.K. Mistri, S. Narayanan, C.A. Preissner, M. Ramanathan, L. Rebuffi, R. Reininger, O.A. Schmidt, X. Shi, J.Z. Tischler, K.J. Wakefield, D. Walko, J. Wang, X. Zhang
    ANL, Lemont, Illinois, USA
 
  Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper.
* Kirkpartrick and Baez, JOSA. 1948; 38(9): 766-773.
** S. Kearney et al., this conference.
*** J. Anton et al., this conference.
**** C. Preissner et al., this conference.
 
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-TUPC10  
About • paper received ※ 02 August 2021       paper accepted ※ 21 October 2021       issue date ※ 31 October 2021  
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THIO01
Design of Next Generation Beam Line Equipment by Applying Advanced Mechatronic Principles  
 
  • T.A.M. Ruijl
    MI-Partners, Eindhoven, The Netherlands
 
  Next generation experiments clearly require beamline equipment with fast and accurate positioning of samples and ultra-stable positioning of optics. Going from the classical quasi-static positioning (point to point) to scanning applications requires a different kind of equipment. The approach to design quasi-static equipment versus scanning equipment with high dynamic performance is very different as well. The shift required in such design approach takes a significant amount of time as it involves new technologies and design experience, to fulfill the high-end requirements finally with sufficient reliability. A market segment, where ultra-precision manufacturing equipment is already required for several decades, is the semiconductor manufacturing industry. Starting with high-end mechatronic equipment in the 90’s, involvement of mechatronics in this area increased very rapidly over the last years. Extremely high precision, with ultra-fast and reliable equipment to fulfill the throughput demands pushes mechatronic developments. Nowadays this equipment requires stages moving at velocities of several m/s, with several tens of m/s2 of accelerations while reaching nm positioning accuracy. Besides extreme reliability to achieve the targets of 100% uptime during 24/7 production, throughput is a driving parameter. Over the years, design principles have been developed to reach these extreme performances. These strategies and principles can also be used for the design next generation beam line equipment. This paper will address some of the principles and how they are applied in a double crystal monochromator at Brazilian light source (LNLS).  
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THOA01 A Family of High-Stability Granite Stages for Synchrotron Applications 341
 
  • C.A. Preissner, S.J. Bean, M. Erdmann
    ANL, Lemont, Illinois, USA
  • M. Bergeret, J.R. Nasiatka
    LBNL, Berkeley, California, USA
 
  Funding: Advanced Photon Source, a U.S. Department of Energy (DOE) Office of Science User Facility, operated for the DOE Office of Science by Argonne National Laboratory under Contract No. DE-AC02-06CH11357.
Engineers at the APS have developed a granite, air-bearing stage concept that provides many millimeters of motion range and nanometer-level vibrational stability. This technique was first conceptualized and used on the Velociprobe x-ray microscope. The success of that design spurred adaption of the approach to over 90 devices, including many new instruments at the APS and high performing instruments at other synchrotrons. This paper details the design concept, some performance measurements, and new developments allowing for a six-degree-of-freedom device.
 
slides icon Slides THOA01 [12.006 MB]  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-THOA01  
About • paper received ※ 13 August 2021       paper accepted ※ 13 October 2021       issue date ※ 10 November 2021  
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THOA02 A New Traveling Interferometric Scheme for the APS Upgrade of the 2-ID Bionanoprobe 345
 
  • S.J. Bean, S. Chen, T. Graber, C. Jacobsen, B. Lai, E.R. Maxey, T. Mooney, C.A. Preissner, X. Shi, D. Shu, J. Tan, W. Wojcik
    ANL, Lemont, Illinois, USA
 
  Funding: Advanced Photon Source, a U.S. Department of Energy (DOE) Office of Science User Facility, operated for the DOE Office of Science by Argonne National Laboratory under Contract No.DE-AC02-06CH11357
The Advanced Photon Source (APS) at Argonne National Laboratory (ANL) is being upgraded to a multi-bend achromat (MBA) lattice storage ring which will increase brightness and coherent flux by several orders of magnitude. As part of this upgrade a total of 15 beamlines were selected to be enhanced to take advantage of the new source ’ these are designated as ’Enhanced Beamlines’. Among these is the enhancement to 2-ID, which includes an upgrade and move of the existing Bionanoprobe (BNP) from 9-ID [1]. This instrument will become the second generation Bionanoprobe II (BNP-II) with intent of studying cryogenic samples with sub-10 nm resolution. This upgrade requires a high performing metrology configuration and design to achieve the desired spatial resolution while adapting to the various constraints of the instrument. The cryogenic sample environment and detection constraints offer significant challenges for implementing a metrology scheme. In this paper we report on the new traveling interferometer configuration proposed for BNP-II.
 
slides icon Slides THOA02 [1.580 MB]  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-THOA02  
About • paper received ※ 29 July 2021       paper accepted ※ 13 October 2021       issue date ※ 29 October 2021  
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