|TUPC10||Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics||199|
Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper.
* Kirkpartrick and Baez, JOSA. 1948; 38(9): 766-773.
** S. Kearney et al., this conference.
*** J. Anton et al., this conference.
**** C. Preissner et al., this conference.
|DOI •||reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2020-TUPC10|
|About •||paper received ※ 02 August 2021 paper accepted ※ 21 October 2021 issue date ※ 31 October 2021|
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